Simulation and experiments on friction and wear of diamond: a material for MEMS and NEMS application
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چکیده
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Simulation and experiments on friction and wear of diamond: a material for MEMS and NEMS application
To date most of the microelectromechanical system (MEMS) devices have been based on silicon. This is due to the technological know-how accumulated on the manipulation, machining and manufacturing of silicon. However, only very few devices involve moving parts. This is because of the rapid wear arising from high friction in these silicon-based systems. Recent tribometric experiments carried out ...
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ژورنال
عنوان ژورنال: Nanotechnology
سال: 1999
ISSN: 0957-4484,1361-6528
DOI: 10.1088/0957-4484/10/3/310